Plant, useful for continuous vacuum coating of substrates, comprises vacuum chamber, and transport device that is arranged in chamber, is configured for transporting substrate along transport path by chamber and comprises transport rollers

摘要

The vertical continuous coating plant comprises a vacuum chamber (1), and a transport device that is arranged in the vacuum chamber, is configured for transporting a substrate along a transport path by the vacuum chamber and comprises transport rollers (5) arranged along the transport path. Two arrangements of the transport rollers are arranged with a vertical distance parallel to each other. A unit (2) for supporting the substrate or a substrate retainer is parallely arranged to one of the two arrangements of the transport rollers and with the distance above the arrangement of the rollers. The vertical continuous coating plant comprises a vacuum chamber (1), and a transport device that is arranged in the vacuum chamber, is configured for transporting a substrate along a transport path by the vacuum chamber and comprises transport rollers (5) arranged along the transport path. Two arrangements of the transport rollers are arranged with a vertical distance parallel to each other. A unit (2) for supporting the substrate or a substrate retainer is parallely arranged to one of the two arrangements of the transport rollers and with the vertical distance above the arrangement of the transport rollers. The supporting unit comprises a guide rail, and supporting rollers. The supporting unit is magnetically formed for a contactless support of the substrate or the substrate retainer. The arrangement of the transport rollers is attached at two different, vertical positions that are spaced apart to each other. The transport rollers comprise a distance body, at which one end of a support wheel is rotatably mounted and other end is formed for an attachment of a planar surface so that the support wheel is held in a distance to the surface. The distance body is a shaft housing, in which a shaft projecting from one side of the shaft housing is rotatably mounted and the support wheel is arranged on the end of the shaft projecting from the shaft housing. The shaft projects at an opposite end of the support wheel from the shaft housing, and a drive wheel is arranged on the end of the shaft. A part of the transport rollers is drivable, and a driving device provided for the transport rollers is arranged outside the vacuum chamber. Apertures are provided for mounting the transport rollers in a wall (11) of the vacuum chamber so that an end of the shaft lying opposite to the support wheel projects form the vacuum chamber.