发明名称 Computer generated hologram and exposure apparatus to suppress an illumination variation and loss in light
摘要 A present invention provides a computer generated hologram which forms a light intensity distribution on a predetermined plane by giving a phase distribution to a wavefront of incident light, the hologram including a first anisotropic cell and second anisotropic cell configured to change a polarization state of the incident light, and a first isotropic cell and second isotropic cell configured not to change the polarization state of the incident light, wherein a direction of an optic axis of the first anisotropic cell is different from a direction of an optic axis of the second anisotropic cell, and a thickness of the first isotropic cell is different from a thickness of the second isotropic cell.
申请公布号 US8437058(B2) 申请公布日期 2013.05.07
申请号 US20080682598 申请日期 2008.12.12
申请人 MATSUBARA ISAO;CANON KABUSHIKI KAISHA 发明人 MATSUBARA ISAO
分类号 G03H1/08 主分类号 G03H1/08
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