发明名称 |
Inspecting method, inspecting system, and method for manufacturing electronic devices |
摘要 |
A method for classifying defects, including: calculating feature quantifies of defect image which is obtained by imaging a defect on a sample; classifying the defect image into a classified category by using information on the calculated feature quantities; displaying the classified defect image in a region on a display screen which is defined to the classified category; adding information on the classified category to the displayed defect image; transferring the displayed defect image which is added the information on the classified category to one of the other categories and displaying the transferred defect image in a region on the display screen which is defined to the one of the other categories; and changing information on the category. |
申请公布号 |
US8428336(B2) |
申请公布日期 |
2013.04.23 |
申请号 |
US20060431709 |
申请日期 |
2006.05.11 |
申请人 |
IKEDA YOKO;KONISHI JUNKO;IWATA HISAFUMI;TAKAGI YUJI;OBARA KENJI;NAKAGAKI RYO;ISOGAI SEIJI;OZAWA YASUHIKO;HITACHI, LTD. |
发明人 |
IKEDA YOKO;KONISHI JUNKO;IWATA HISAFUMI;TAKAGI YUJI;OBARA KENJI;NAKAGAKI RYO;ISOGAI SEIJI;OZAWA YASUHIKO |
分类号 |
G06F3/048;G06K9/00;G01N21/84;G06F3/00;G06T1/00;G06T7/00 |
主分类号 |
G06F3/048 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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