发明名称 METHOD FOR MEASURING END FACE ANGLE OF SEMICONDUCTOR LASER ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a method capable of easily and accurately measuring an angle of a resonance end face of a semiconductor laser element. <P>SOLUTION: A semiconductor laser bar 2 including multiple semiconductor laser elements aligned in a direction of crossing an optical waveguide direction of an optical waveguide is fixed on a reference surface 21a of a stage 21 so that resonance end faces 2a are along a predetermined reference line 21b, a laser beam La is radiated from each of the resonance end faces of the multiple semiconductor laser elements in the semiconductor laser bar 2, an FFP (far field pattern) of the laser beam La is measured, and an angle of each of the resonance end faces of the semiconductor laser elements is calculated on the basis of a relative angle between a radiation direction of the laser beam La defined by a peak position of the FFP, and the predetermined reference line 21b and the reference surface 21a. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013061228(A) 申请公布日期 2013.04.04
申请号 JP20110199544 申请日期 2011.09.13
申请人 SUMITOMO ELECTRIC IND LTD 发明人 KUMANO TETSUYA
分类号 G01B11/26;H01S5/00 主分类号 G01B11/26
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