HALF TONE MASK HAVING MULTI HALF PERMEATION PART

摘要

PURPOSE: A half tone mask with a multiple semi-penetrating unit is provided to prevent the increase of transmittance by forming semi-penetrating units with a crystallized structure which develops from a semi-transparent material film through high temperature heat treatment. CONSTITUTION: A half tone mask comprises two or more semi-penetrating units(121,151,153). For the semi-penetrating units, semi-penetrating substances are laminated on a transparent substrate. The semi-penetrating units transmit incident lights at different transparencies from one another. At least one of the semi-penetrating units includes a structure with a passivation layer which is crystallized on a non-crystallized layer.