发明名称 Heterojunction bipolar transistors with reduced base resistance
摘要 Heterojunction bipolar transistors with reduced base resistance, as well as fabrication methods for heterojunction bipolar transistors and design structures for BiCMOS integrated circuits. The heterojunction bipolar transistor includes a conductive layer between the intrinsic base and the extrinsic base. The conductive layer is comprised of a conductive material, such as a silicide, having a lower resistivity than the materials forming the intrinsic base and the extrinsic base.
申请公布号 US8389372(B2) 申请公布日期 2013.03.05
申请号 US20100951516 申请日期 2010.11.22
申请人 DAHLSTROM ERIK M.;GRAY PETER B.;LIU QIZHI;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 DAHLSTROM ERIK M.;GRAY PETER B.;LIU QIZHI
分类号 H01L21/331;H01L21/8222 主分类号 H01L21/331
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