| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramics heater which allows for enhancement in the control precision of temperature distribution. <P>SOLUTION: According to the inventive ceramics heater 1, the heat generated from each heat element Qk(k=1-5) can be made to pass through the bonding interface Sj(j=1-3) from a ceramics substrate 2, and then flow into the low temperature part of a ceramics support member 4. The bonding interface Sj of the ceramics substrate 2 and the ceramics support member is located discretely in a direction perpendicular to an axis line normal to the mounting surface S of the ceramics substrate 2 so as to surround the axis line. <P>COPYRIGHT: (C)2013,JPO&INPIT |
