发明名称 |
COAXIAL CABLE AND SUBSTRATE PROCESSING APPARATUS |
摘要 |
According to one embodiment, there is provided a coaxial cable that transmits radio frequency power. The coaxial cable includes an inner tube, an outer tube, and an insulating support member. The inner tube is made of a conductor. The outer tube is disposed outside the inner tube coaxially with the inner tube and is made of a conductor. The insulating support member is disposed between the inner tube and the outer tube. Cooling gas flows into at least one of a first space inside the inner tube and a second space between the inner tube and the outer tube.
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申请公布号 |
US2013008603(A1) |
申请公布日期 |
2013.01.10 |
申请号 |
US201213422366 |
申请日期 |
2012.03.16 |
申请人 |
KABUSHIKI KAISHA TOSHIBA;ETO HIDEO;NISHIYAMA NOBUYASU;SAITO MAKOTO;OUCHI JUNKO |
发明人 |
ETO HIDEO;NISHIYAMA NOBUYASU;SAITO MAKOTO;OUCHI JUNKO |
分类号 |
H01B11/18;B44C1/22;C23C16/509;C23C16/52;H05H1/24 |
主分类号 |
H01B11/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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