| 摘要 |
<p>The present invention is a one-dimensional transport path unit that transports an object being transported (1) in a one-dimensional direction, and is provided with: a transport path (2) which extends in the one-dimensional direction, and is defined by two ends in the one-dimensional direction, a bottom and a top, and two sides; two cavities (3a, 3b) which are disposed on both sides so as to sandwich two sides (6a) that define the transport path (2), and are defined by a bottom and a top, and four sides; an evacuating part (15) that evacuates the two cavities (3a, 3b) from openings (13) disposed at the bottom of the two cavities (3a, 3b); and a top plate (4) that constitutes the top of the transport path (2), and also constitutes the top of the two cavities (3a, 3b), and covers the transport path (2) and the two cavities (3a, 3b). By evacuating the insides of the two cavities (3a, 3b) from the evacuation part (15), the sides (6a) that define the transport path (2) and the sides (6b) that define the two cavities (3a, 3b) adhere to the top plate (4).</p> |
