发明名称
摘要 Apparatus (20) for producing and sustaining a glow discharge plasma in a plasma discharge space (11) comprising at least two spaced apart electrodes (13, 14), means (12) for supplying a gas or a gas mixture (9) under atmospheric pressure conditions in the discharge space (11), AC power supply means (15) for energizing the electrodes (13, 14), and electric stabilisation means (21) for stabilizing current variations in the plasma. The stabilisation means (21) connect between the electrodes (13, 14) and the power supply means (15), and are arranged for providing a negative feedback opposed to a positive feedback of the plasma to instabilities in the plasma.
申请公布号 JP5085834(B2) 申请公布日期 2012.11.28
申请号 JP20030273106 申请日期 2003.07.10
申请人 发明人
分类号 H05H1/24;B01J19/08;C23F4/00;H01J37/32;H01L21/205;H05H1/46 主分类号 H05H1/24
代理机构 代理人
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