| 摘要 |
Preferred embodiments provide a method for fabricating pyrolysed carbon nanostructures, the method comprises at least following steps: Providing a substrate, and then Depositing a polymeric material comprising either compounds with different plasma etch rates or compounds that can mask a plasma etching process, and then Subjecting said polymeric material to a plasma etching process (e.g. oxygen plasma) to form polymeric nanostructures and then Pyrolysing said polymeric nanostructures to form carbon nanostructures. |
