LASER SYSTEM, EXTREME-ULTRAVIOLET LIGHT GENERATION SYSTEM, AND LASER LIGHT GENERATION METHOD

摘要

PROBLEM TO BE SOLVED: To obtain stabilized laser light.

SOLUTION: The laser system comprises: a seed laser system configured to output pulse laser light; a pulse energy adjustment section configured to change the pulse energy of the pulse laser light; at least one amplifier configured to amplify the pulse laser light; at least one power supply configured to change the excitation intensity of the at least one amplifier; and a controller configured to control the at least one power supply for every multiple pulses of the pulse laser light, by controlling the pulse energy adjustment section for every pulse of the pulse laser light.

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