Device for transverse- and forward transportation of wafers in intermediate station of wafer processing, has longitudinal transport band and rubber rolling element that is driven over circumference of longitudinal transport band

摘要

The device has a circumferential longitudinal transport band (1,2) and a rubber rolling element that is movably rotationally driven over a circumference of the longitudinal transport band. A cover plate (8) has openings (10,11) for partial penetration of the rubber rolling element during the movement over the circumference of the longitudinal transport band. The rubber rolling element has a compressed air opening.