发明名称 |
METALORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD) PROCESS AND APPARATUS TO PRODUCE MULTI-LAYER HIGH-TEMPERATURE SUPERCONDUCTING (HTS) COATED TAPE |
摘要 |
An MOCVD apparatus and process for producing multi-layer HTS-coated tapes with increased current capacity which includes multiple liquid precursor sources, each having an associated pump and vaporizer, the outlets of which feed a multiple compartment showerhead apparatus within an MOCVD reactor. The multiple compartment showerhead apparatus is located in close proximity to an associated substrate heater which together define multiple deposition sectors in a deposition zone.
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申请公布号 |
US2012258863(A1) |
申请公布日期 |
2012.10.11 |
申请号 |
US201213442844 |
申请日期 |
2012.04.09 |
申请人 |
SUPERPOWER, INC. |
发明人 |
SELVAMANICKAM VENKAT;LEE HEE-GYOUN |
分类号 |
H01L39/24;C04B35/45;C23C16/00;C23C16/40;C23C16/455;C23C16/54;H01B12/02;H01B13/00;H01L39/12 |
主分类号 |
H01L39/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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