| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a method of electron beam machining, which reduces machining time without generating unevenness in machining when machining a surface of a workpiece by irradiation of an electron beam. <P>SOLUTION: An irradiation point of the electron beam having a predetermined space on the surface of the workpiece is determined based on shape data of the workpiece, the electron beam is emitted to the irradiation point and the electron beam is sequentially deflected in a region centering on the irradiation point at a preset cycle for each irradiation point. <P>COPYRIGHT: (C)2013,JPO&INPIT |
