| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus and the like capable of preventing excessive current from passing through a semiconductor device. <P>SOLUTION: An inspection apparatus 100 comprises: a semiconductor device 10; a power supply 20; a switching element 24; a control part 50; a switching part 70; and an inspection part 26. When current is passed through the semiconductor device 10 by the power supply 20 in a state where the switching element 24 connects between the power supply 20 and the semiconductor device 10 and the switching part 70 turns on the semiconductor device 10, the control part 50 sets, to a first value, a saturation current that can be passed through the switching element 24 if breakdown by current occurs in the semiconductor device 10. When voltage is applied to the semiconductor device 10 by the power supply 20 in a state where the switching element 24 connects between the power supply 20 and the semiconductor device 10 and the switching part 70 turns off the semiconductor device 10, the control part 50 sets, to a second value smaller than the first value, a saturation current that can be passed through the switching element 24 if breakdown by voltage occurs in the semiconductor device 10. <P>COPYRIGHT: (C)2013,JPO&INPIT |
