发明名称 FILTRATION FILTER AND PRODUCTION METHOD THEREFOR
摘要 <p>Provided is a filtration filter with which a stable opening size during filtration is obtained, and which can be easily regenerated when clogged and used repeatedly. The filtration filter (10) comprises: a substrate stack wherein substrates (11) that have a through hole that penetrates from front to back are stacked; stoppers (15) that define the spacing between the substrates (11); and pillars (16) with a larger thermal expansion coefficient than the stoppers (15). The lengths of the pillars (16) are made to be longer than the lengths of the stoppers (15). The spacing between the substrates (11) at normal temperature is defined at least by the stoppers (15), and the spacing during heating is defined by the thermally expanded pillars (16). The gaps between the substrates (11) form the filtration surface that traps contaminants contained in the liquid that is being treated (A).</p>
申请公布号 WO2012128235(A1) 申请公布日期 2012.09.27
申请号 WO2012JP56953 申请日期 2012.03.13
申请人 TOKYO ELECTRON LIMITED;MORIYA, TSUYOSHI;YAMASHITA, ASAO 发明人 MORIYA, TSUYOSHI;YAMASHITA, ASAO
分类号 B01D29/46;B01D29/62;B01D29/66;B01D39/10;B01D39/16;B01D39/20;B01D65/02;B01D69/02;B01D71/02;B01D71/64 主分类号 B01D29/46
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