SUBSTRATE PROCESSING APPARATUS WITH A NON-CONTACT FLOATING TRANSFER SYSTEM

摘要

PURPOSE: A substrate processing apparatus with a noncontact floating transfer function is provided to stably transfer a substrate using the mechanical force of a substrate transfer roller which rotates in contact with the edge of the substrate. CONSTITUTION: A substrate floating unit(10) maintains the position of a substrate with a noncontact type. A circular hole to discharge fluid is formed on the upper side of the substrate floating unit. A slit is formed on the upper plane of the substrate floating unit. A water or chemical pump is installed on the lower side of a water or chemical processing unit(7). An air blower(31) is arranged on the lower side of a dry processing unit(9).