发明名称 Using optical deflection of cantilevers for alignment
摘要 A calibration leveling system and method are provided which improve printing and imaging at the nanoscale including improved tip-based deposition and nanolithography. The system can include a scanning probe instrument having a video camera with an adjustable lens. The scanner can be coupled to a one or two dimensional array of cantilevers comprising cantilever tips for imaging or printing. The scanning probe instrument has one or more motors for controlling the scanner in the z-axis. The z-axis motors position the scanner so that the cantilever tips are in a level orientation relative to the surface of a substrate. Once the cantilever tips are level with the substrate, the positions of the z-axis motors can be recorded for future reference.
申请公布号 US8256017(B2) 申请公布日期 2012.08.28
申请号 US20070848211 申请日期 2007.08.30
申请人 HAAHEIM JASON;NANOINK, INC. 发明人 HAAHEIM JASON
分类号 G01Q10/04 主分类号 G01Q10/04
代理机构 代理人
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