| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a package for a pressure sensor and the pressure sensor capable of sensitively detecting external pressure, and a manufacturing method of the package for the pressure sensor. <P>SOLUTION: A package for a pressure sensor comprises: an insulated structure 1 having internal space S; and an upper electrode 6 and a lower electrode 5 disposed on respectively a facing upside and downside of an inner wall surface of the internal space S. In the package for the pressure sensor, at least one of the upside and downside of the inner wall surface has a flexible area bending when pressure from the outside is applied. In the insulated structure 1, a cavity section 7 extending from the internal space S to an outer surface of the insulated structure 1 is formed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
