发明名称 METHOD FOR MEASURING ABSOLUTE DISTANCE OF LASER INTERFERENCE MEASURING DEVICE, AND LASER INTERFERENCE MEASURING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for measuring an absolute distance capable of favorably measuring the absolute distance to an object to be measured. <P>SOLUTION: The method for measuring an absolute distance includes: waveform changing steps S1A, S1D and S1G for changing a resonator length with the object to be measured retained stationary and changing the wavelength of a laser beam; phase detecting steps S1B, S1E, and S1H for detecting the phases of respective interference signals at respective time points when the oscillation frequency of the laser beam is matched with the respective frequencies of a plurality of saturated absorption lines; and a first absolute distance calculating step S1J for calculating a first absolute distance to the object to be measured based on the respective frequencies of the plurality of saturated absorption lines and the phases of the respective interference signals. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012145362(A) 申请公布日期 2012.08.02
申请号 JP20110001987 申请日期 2011.01.07
申请人 MITSUTOYO CORP 发明人 MIYATA KAORU
分类号 G01B9/02 主分类号 G01B9/02
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