Device and method for spraying a structure made of conductive material on a substrate

摘要

The device has a control unit controlling volume flow in such a manner that electric voltage lies between outer and inner electrodes (5, 7) during operating of the device. Carrier gas flowing through a flow channel (6) is ionized along flow direction (20) such that a conductive material brought into the channel by a supply line is partially liquefied. Another supply line (3) for focusing gas is provided at a region of an outlet opening (19) such that a focusing gas-flow ring is formed around the ionized carrier gas with the partially liquefied material at the opening during operation.