| 摘要 |
<p>Positional information of a stage is obtained using an interferometer system only during an exposure time when a constant speed drive of the stage is performed to form a pattern. Therefore, the linear measurement of the positional information is secured enough, which makes it possible to linearly drive the stage with high accuracy. Meanwhile, between an acceleration time and a deceleration time in which a step drive is performed, the positional information of the stage is obtained using an encoder system and a surface position measurement system. Therefore, measurement reproducibility of the positional information is sufficiently secured by the mechanical stability of a diffraction grating, which makes it possible to drive the stage precisely to the starting position of the constant speed drive.</p> |
