SUBSTRATE SUPPORTING APPARATUS AND THIN FILM DEPOSITION APPARATUS COMPRISING THE SAME

摘要

PURPOSE: A substrate supporting apparatus and an apparatus for depositing a thin film including the same are provided to extend the washing cycle of a base member by mounting a cover on a part excluding a protrusion part of a base member. CONSTITUTION: A base member(110) has a protrusion part. A substrate is mounted on the protrusion part. A stepped part(120) is overlapped in an edge of the substrate. An attaching/detaching member(130) is mounted on the stepped part to be dissembled. The attaching/detaching member supports the edge of the substrate.