SUBSTRATE LOADINF/UNLOADING FRAME, AND THIN FILM DEPOSITION APPARATUS COMPRISING THE SAME

摘要

PURPOSE: A substrate loading/unloading frame and an apparatus for depositing a thin film including the same are provided to form a uniform thin film on a front side of a substrate by preventing heat loss from a preheated substrate. CONSTITUTION: A substrate loading/unloading frame(120) is installed in a process chamber and supports a substrate loaded from outside or the substrate unloaded to outside. A susceptor(140) supports the substrate supported on the substrate loading/unloading frame when being lifted or mounts a mounted substrate on the substrate loading/unloading frame. A plate is mounted on an edge portion of the susceptor when the susceptor is lifted. A plurality of substrate support members(123) is installed on the plate to be separable and supports the substrate.