| 摘要 |
An excimer discharge lamp comprises an electric discharge container having an electric discharge space, a pair of electrodes provided on an outer face of the electric discharge container, and an electric discharge gas enclosed in the electric discharge space. Further the electric discharge container comprises a tubular side wall on which the pair of electrodes is formed, one end wall for sealing one end of the side wall, and another end wall that is provided on the other side of the side wall. The side wall and the end walls are made of sapphire, YAG, or single crystal yttria. A chip pipe is provided on the another end wall, and a partition member made of sapphire, YAG, or single crystal yttria is formed between a shortest distance of the chip pipe and the inner face of the side wall. |
