发明名称 Combination of a substrate and a wafer
摘要 The invention pertains to a combination of a substrate (6) and a wafer (15), wherein the substrate (6) and the wafer (15) are arranged parallel to one another and bonded together with the aid of an adhesive layer (8) situated between the substrate (6) and the wafer (15), and wherein the adhesive is chosen such that its adhesive properties are neutralized or at least diminished when a predetermined temperature is exceeded. According to the invention, the adhesive layer (8) is only applied annularly between the substrate (6) and the wafer (15) in the edge region of the wafer (15).
申请公布号 US8156981(B2) 申请公布日期 2012.04.17
申请号 US20100916734 申请日期 2010.11.01
申请人 THALLNER ERICH 发明人 THALLNER ERICH
分类号 B29C65/00 主分类号 B29C65/00
代理机构 代理人
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