发明名称 MONOMER COOLING TRAP AND MONOMER EVAPORATION DEVICE USING SAME
摘要 <p>The present invention pertains to a monomer cooling trap, which is mounted on a path through which gas and monomers generated in the process of evaporation are discharged to the outside, and characterized by comprising: a case; a suction hole for sucking the gas and the monomers; a cooling plate received in the case and having a path formed inside so that refrigerant may flow therethrough, a surface to which the monomers are attached, and a through hole that is formed to penetrate upper and lower surfaces; and an exhaust hole for discharging gas from the inside of the case.</p>
申请公布号 WO2012039523(A1) 申请公布日期 2012.03.29
申请号 WO2010KR06626 申请日期 2010.09.29
申请人 SNU PRECISION CO., LTD.;YOON, HYUNG-SEOK;NAMGOONG, SUNG-TAE;KIM, JANG-MI;PARK, IL-JUN 发明人 YOON, HYUNG-SEOK;NAMGOONG, SUNG-TAE;KIM, JANG-MI;PARK, IL-JUN
分类号 B01D8/00;C23C14/12;H01L51/56 主分类号 B01D8/00
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