| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cluster deposition apparatus that further increases the intensity of a cluster beam and also properly deposit a cluster on a substrate to effectively use the cluster. <P>SOLUTION: The cluster deposition apparatus includes: a laser device for radiating a laser beam on an evaporation surface of a target so as to generate the cluster by evaporating the target T; a cluster generation body 12 having a cluster generation chamber 31 for trapping the generated cluster; and a holder 13 for holding the substrate S so that a deposition surface of the substrate faces the inside of the cluster generation chamber. <P>COPYRIGHT: (C)2012,JPO&INPIT |
