发明名称 Electroless Cu plating for enhanced self-forming barrier layers
摘要 Methods and an apparatus are described for an integrated circuit within which an electroless Cu plated layer having an oxygen content is formed on the top of a seed layer comprising Cu and Mn. The integrated circuit is then exposed to a sufficient high temperature to cause the self-formation of a MnSiOx barrier layer.
申请公布号 US8138084(B2) 申请公布日期 2012.03.20
申请号 US20090646618 申请日期 2009.12.23
申请人 AKOLKAR ROHAN N.;INTEL CORPORATION 发明人 AKOLKAR ROHAN N.
分类号 H01L21/44;H01L21/4763 主分类号 H01L21/44
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