| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminated structure in which an indium target adheres favorably to a backing plate, and inclusion of unnecessary impurities in the indium target is properly inhibited, and to provide a method for production thereof. <P>SOLUTION: The laminated structure is provided with a backing plate, an alloy thin film which is formed on the backing plate and comprises an alloy of indium and gallium whose concentration is 1.0-30 atom%, and the indium target formed on the alloy thin film. <P>COPYRIGHT: (C)2012,JPO&INPIT |
