| 摘要 |
PURPOSE: A beveling method of brittle material and an apparatus thereof are provided to increase beveling efficiency using a simple structure having a glow discharge. CONSTITUTION: A beveling apparatus of brittle material comprises a beveling tool(5) which bevels an end surface of a board shaped brittle material(2) and a transferring tool(6) which transfers the beveling tool. Once the brittle material is carried on a suction table(3), a housing(7) moves forward by the transferring tool and the end surface of the brittle material is inserted into a holding portion(7B). When negative pressure flows into a low pressure chamber(7A) and voltages are applied to electrodes(11A), a glow discharge is generated between the electrodes and the end surface is heated. The housing is carried along the longitudinal direction of the end surface and the end surface is beveled by fusing the entire upper and lower edge parts thereof.
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