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经营范围
发明名称
Scanning particle beam instrument
摘要
申请公布号
EP1632980(B1)
申请公布日期
2012.01.18
申请号
EP20050018964
申请日期
2005.08.31
申请人
CARL ZEISS NTS LIMITED
发明人
ARMIT, ANDREW PHILIP
分类号
H01J37/244;H01J37/26;H01J37/28;H04N5/57
主分类号
H01J37/244
代理机构
代理人
主权项
地址
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