LASER PROCESSING DEVICE AND LASER PROCESSING METHOD

摘要

While preventing the edge deletion processing time of a thin-film photovoltaic cell panel from increasing, processing quality can be improved. A process is repeated in which a light spot is made to scan a thin-film photovoltaic cell panel (102) in a main scanning direction toward which an optical unit proceeds, is then moved to the next row, is then made to scan in the opposite direction to the main scanning direction, and is then moved to the next row in the order of arrows (311a, 311b, ..., 311k). After the light spot is made to scan in the direction of the arrow (311k), the light spot is made to scan in the direction of an arrow (311l) and is made to scan in the same manner also in the next processing block. This scanning is repeated until peeling of the thin film in a linear region along a side (301a) of the thin-film photovoltaic cell panel (102) is completed. The invention can be applied to, for example, a laser processing device for performing an edge deletion.