| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a position sensor which can be assembled in a compact unit, and can provide position measurement values of plural flexibility. <P>SOLUTION: A position sensor is constituted to measure position data of a target. The position sensor includes a radiation source for irradiating a radiation beam, a first lattice for diffracting the radiation beam in a first diffraction direction so as to diffract to at least one primary irradiation beam, and a second lattice, disposed in a light path of the primary diffraction beam, for diffracting the primary diffraction beam diffracted by the first lattice in a second diffraction direction actually vertical to the first diffraction direction. The second lattice is connected to a target. A first detector detects at least a part of the beam diffracted by the first lattice, and at least one of the second detectors detects at least a part of the beam diffracted by the first lattice and the second lattice. <P>COPYRIGHT: (C)2012,JPO&INPIT |
