Device for detecting radiation of machining workpiece, comprises lens, outer rim of lens, focusing mirror, scraper mirror, and detectors, where intensity of laser emitted from workpiece in radiation process is detected by outer rim

摘要

The device comprises a lens, an outer rim of the lens, a focusing mirror, a scraper mirror, and detectors, where the intensity of laser emitted from the workpiece in the radiation process is detected by the outer rim of the lens arranged in the machining head facing the scraper mirror attached on the machining head and deflected perpendicular to the laser beam and falls on the focusing mirror. The intensity of excessive and unwanted laser radiation reflected in part from the workpiece is cut by the radiation process and is divided into its spectral components. The device comprises a lens, an outer rim of the lens, a focusing mirror, a scraper mirror, and detectors, where the intensity of laser emitted from the workpiece in the radiation process is detected by the outer rim of the lens arranged in the machining head facing the scraper mirror attached on the machining head and deflected perpendicular to the laser beam and falls on the focusing mirror. The intensity of excessive and unwanted laser radiation reflected in part from the workpiece is cut by the radiation process and is divided into its spectral components and focused on detectors. The focusing element: consists of a Fresnel zone plate; is formed with reflective surfaces made of polished metal; is executed as ring lattice, a reflection phase grating with preferred-reflection and as Blazed grating, or as a combination of Fresnel zone plate and Blazed grating, where the rings of the lattice are getting thinner on the outside of a grid as the Fresnel zone plate; and exhibits a helical structure instead of an annular structure. The focused element is designed not only for the first order but also for higher orders 2, 3 or more and during the blazed grating, the propagation vector of light vertically stands on the grooves for the selected higher order.