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摘要
申请公布号
JP4800123(B2)
申请公布日期
2011.10.26
申请号
JP20060177068
申请日期
2006.06.27
申请人
发明人
分类号
H01L21/8246;G11C11/15;H01L27/105;H01L43/08
主分类号
H01L21/8246
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代理人
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