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发明名称
PLASMA PROCESSING APPARATUS
摘要
申请公布号
KR20110116922(A)
申请公布日期
2011.10.26
申请号
KR20100036606
申请日期
2010.04.20
申请人
TERASEMICON CORPORATION
发明人
LEE, KYUNG HO
分类号
H05H1/34;H01L21/3065;H01L31/18
主分类号
H05H1/34
代理机构
代理人
主权项
地址
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