发明名称 CLEANING NOZZLE, AND CLEANING METHOD AND CLEANING DEVICE OF SOLID SURFACE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a cleaning nozzle which can be heated up to a temperature at which a necessary cleaning ability can be obtained, has a sufficiently high cleaning power to an extraneous matter on a surface of solid material, does not require a large size facility for exhaust after the cleaning and can complete the cleaning treatment in a short time. SOLUTION: The cleaning nozzle 1 for generating self-generation two fluids F obtained by boiling heated and pressurized water under an ordinary pressure comprises: an orifice part 2 provided with a flow channel for controlling a flow rate of the heated and pressurized water; an expanded diameter part 3 which is formed on the downstream side of the orifice part 2 and has a cross-section area of the flow channel of the orifice part 2 expanded therein to produce self-generation two fluids F; and a rectifying part 4 which is formed on the downstream side of the expanded diameter part 3, is provided with a flow channel having a cross-section area larger than that of the orifice part 2 and guides the self-generation two fluids F to the downstream side. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011189332(A) 申请公布日期 2011.09.29
申请号 JP20100110711 申请日期 2010.05.13
申请人 HITACHI CABLE LTD 发明人 SAEKI TOMONORI;ANDO YOSHIYUKI
分类号 B08B3/02;B05B1/30;B05B7/12;C23G3/00;H01L21/304 主分类号 B08B3/02
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