发明名称 SEMICONDUCTOR DEVICE
摘要 An object is to provide a semiconductor device including an oxide semiconductor in which miniaturization is achieved while favorable characteristics are maintained. The semiconductor includes an oxide semiconductor layer, a source electrode and a drain electrode in contact with the oxide semiconductor layer, a gate electrode overlapping with the oxide semiconductor layer, a gate insulating layer provided between the oxide semiconductor layer and the gate electrode, and an insulating layer provided in contact with the oxide semiconductor layer. A side surface of the oxide semiconductor layer is in contact with the source electrode or the drain electrode. An upper surface of the oxide semiconductor layer overlaps with the source electrode or the drain electrode with the insulating layer interposed between the oxide semiconductor layer and the source electrode or the drain electrode.
申请公布号 WO2011096275(A1) 申请公布日期 2011.08.11
申请号 WO2011JP50900 申请日期 2011.01.13
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD.;GODO, HIROMICHI;ARAI, YASUYUKI;OKAMOTO, SATOHIRO;TERASHIMA, MARI;NISHIDA, ERIKO;SUGAO, JUNPEI 发明人 GODO, HIROMICHI;ARAI, YASUYUKI;OKAMOTO, SATOHIRO;TERASHIMA, MARI;NISHIDA, ERIKO;SUGAO, JUNPEI
分类号 H01L29/786;H01L21/28;H01L21/8242;H01L27/108;H01L29/417 主分类号 H01L29/786
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