| 摘要 |
The invention provides a solid-state imaging device and a method of manufacturing a solid-state imaging device capable of reducing a variation in the shape of an in-layer lens and deeply forming a lens portion. Disclosed is a method of manufacturing a solid-state imaging device including a photoelectric conversion unit and a light shielding film. The method includes: forming the light shielding film; forming a first insulating film and performing a reflow process on the first insulating film; etching the first insulating film such that the first insulating film remains only in a side portion of the light shielding film; forming a second insulating film; and forming another insulating film. A lens portion is formed on another insulating film so as to protrude toward the photoelectric conversion unit, and the lens portion has a shape corresponding to the surface shape of the second insulating film.
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