| 摘要 |
To provide a semiconductor device including an interface chip and a core chip and a measurement-target signal line and a reference signal line each including a through silicon via provided in the core chip and electrically connecting the interface chip and the core chip. The interface chip outputs a test clock generated by a first signal generation circuit to the core chip. The core chip includes a second signal generation circuit that generates a predetermined measurement signal from the test clock, and outputs the predetermined measurement signal to the measurement-target signal line and the reference signal line in a simultaneous manner. Further, the interface chip detects a phase difference of a plurality of predetermined measurement signals input via the measurement-target signal line and the reference signal line by an operational amplifier, and outputs a test result to a determination circuit.
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