| 摘要 |
PROBLEM TO BE SOLVED: To provide a developing device which is easy to control the process at a low running cost without degrading the quality, together with its developing method and developer solution circulating method. SOLUTION: The developing device includes: (1) a developer solution circulation system equipped with a developing tank to carry out the developing process, a means to send the developer solution in the developer solution circulation tank to the developing tank, and a means to return the developer solution after used for developing in the developing tank back to the developer solution circulation tank; (2) an ultra-filter to separate the developer solution into the filtered solution and the concentrated solution; and (3) a filtered and concentrated solution circulation system including an ultra-filtrated-concentrated solution tank to hold the developer solution partly taken out from the developer solution circulation tank, a means to send the developing solution in the ultra-filtrated-concentrated solution tank to the ultra-filter, a means to return the concentrated solution separated in the ultra-filter to the ultra-filtrated-concentrated solution tank, and a means to return the filtered solution separated by the ultra-filter to the developer solution circulation system. COPYRIGHT: (C)2011,JPO&INPIT |
