| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration device having vibration-resistance and shock-resistance performance against disturbance vibration. <P>SOLUTION: A yaw rate sensor device 1 includes: a yaw rate sensor element 2 including a piezoelectric element on a semiconductor substrate; and a plate-like fixing unit 5 for fixing and supporting the yaw rate sensor element 2. Both the ends of the fixing unit 5 are held by fixing unit holding stands 45, 45' provided within a case 4 and the fixing unit 5 extends in an extension direction of the semiconductor substrate. <P>COPYRIGHT: (C)2011,JPO&INPIT |
