发明名称 |
TANTALUM CARBIDE-COATED CARBON MATERIAL AND MANUFACTURING METHOD FOR SAME |
摘要 |
A tantalum carbide coating film (42) which covers a carbon substrate (41) is formed on the surface of the carbon substrate (41). The tantalum carbide coating film (42) has a maximum peak value of at least 80° in the (311) plane orientation of a diffraction peak corresponding to the tantalum carbide as determined by X-ray diffraction. |
申请公布号 |
WO2011081210(A1) |
申请公布日期 |
2011.07.07 |
申请号 |
WO2010JP73810 |
申请日期 |
2010.12.28 |
申请人 |
TOYO TANSO CO., LTD.;KONDO, MIKA |
发明人 |
KONDO, MIKA |
分类号 |
C23C16/32;C30B29/36;H01L21/205 |
主分类号 |
C23C16/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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