发明名称 TANTALUM CARBIDE-COATED CARBON MATERIAL AND MANUFACTURING METHOD FOR SAME
摘要 A tantalum carbide coating film (42) which covers a carbon substrate (41) is formed on the surface of the carbon substrate (41). The tantalum carbide coating film (42) has a maximum peak value of at least 80° in the (311) plane orientation of a diffraction peak corresponding to the tantalum carbide as determined by X-ray diffraction.
申请公布号 WO2011081210(A1) 申请公布日期 2011.07.07
申请号 WO2010JP73810 申请日期 2010.12.28
申请人 TOYO TANSO CO., LTD.;KONDO, MIKA 发明人 KONDO, MIKA
分类号 C23C16/32;C30B29/36;H01L21/205 主分类号 C23C16/32
代理机构 代理人
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