METHOD FOR REDUCING POROSITY OF A METAL DEPOSIT BY IONIC BOMBARDMENT,申请号EP20080835347-传众专利搜索

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发明名称	METHOD FOR REDUCING POROSITY OF A METAL DEPOSIT BY IONIC BOMBARDMENT
摘要
申请公布号	EP2188407(B1)	申请公布日期	2011.06.29
申请号	EP20080835347	申请日期	2008.09.11
申请人	QUERTECH INGENIERIE	发明人	BUSARDO, DENIS
分类号	C23C14/06;C23C14/48;H01L21/3215	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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