REPLACEABLE UPPER CHAMBER PARTS OF PLASMA PROCESSING APPARATUS
摘要
An upper chamber section of a plasma reaction chamber includes a ceramic window with blind bores in an upper surface for receipt of a thermal couple and a resistance temperature detector, a top chamber interface which comprises an upper surface which vacuum seals against the bottom of the window and a gas injection system comprising 8 side injectors mounted in the sidewall of the top chamber interface and a gas delivery system comprising tubing which provides symmetric gas flow to the 8 injectors from a single gas feed connection.
申请公布号
WO2011031321(A3)
申请公布日期
2011.06.23
申请号
WO2010US02473
申请日期
2010.09.10
申请人
LAM RESEARCH CORPORATION;BROWN, DANIEL, ARTHUR;BOGART, JEFF, A.;KENWORTHY, IAN, J.
发明人
BROWN, DANIEL, ARTHUR;BOGART, JEFF, A.;KENWORTHY, IAN, J.