摘要 |
<p>PURPOSE: A manufacturing apparatus and method for flat display device is provided to decrease a separating force of a mold, is minimized a damage of the mold for imprint by separate successively from the substrate by using a shearing force. CONSTITUTION: A manufacturing apparatus for flat display device comprises: a mold for imprinting(110), and a movable separating unit(122). The mold for imprint has a projected portion and a groove. The mold for imprint is pressed to a substrate for forms a thin film patterns(104) on the substrate(101). The movable separating unit is rotating/moving and vacuum-sucks the mold for imprint.</p> |