MAGNET UNIT AND SPUTTERING DEVICE INCLUDING THE SAME

摘要

PURPOSE: A magnet unit and a sputtering device therewith are provided to extend the service life of a target by reducing the erosion amount of a target area corresponding to both ends of a center magnet. CONSTITUTION: A magnet unit comprises one or more center magnets(110), peripheral magnets(120), and auxiliary magnets. The peripheral magnets cover the surrounding of the center magnets. The auxiliary magnets are located at both ends of the center magnets. The center magnets are reciprocated in the longitudinal or lateral direction of the center magnets. The peripheral magnets are reciprocated in the lateral or longitudinal direction of the center magnets.