RELAXATION OF STRAINED LAYERS

摘要

The present invention relates to a method for relaxing a strained material layer by depositing a first low-viscosity layer on a first face of a strained-material layer; bonding a first substrate to the first low-viscosity layer to form a first composite structure; subjecting the composite structure to heat treatment sufficient to cause reflow of the first low-viscosity layer so as to at least partly relax the strained-material layer; and applying a mechanical pressure to a second face of the strained material layer which is opposite to the first face. The mechanical pressure is applied perpendicularly to the strained material layer during at least part of the heat treatment.